Lucas NovaSensor
7Patents
0Active
7Granted
29Portfolio score
Filing activity: Sep 13, 1991 → Oct 6, 1997
Most-cited patents
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5355712A | Method and apparatus for thermally actuated self testing of silicon structures | Physics | 79 | Expired |
| US6038928A | Miniature gauge pressure sensor using silicon fusion bonding and back etching | Physics | 55 | Expired |
| US5231301A | Semiconductor sensor with piezoresistors and improved electrostatic structures | Physics | 54 | Expired |
| US5461922A | Pressure sensor isolated within housing having integral diaphragm and method of making same | Electricity | 46 | Expired |
| US6084257A | Single crystal silicon sensor with high aspect ratio and curvilinear structures | Emerging Cross-Sectional Technologies | 21 | Expired |
| US6316796A | Single crystal silicon sensor with high aspect ratio and curvilinear structures | Emerging Cross-Sectional Technologies | 15 | Expired |
| US6140143A | Method of producing a buried boss diaphragm structure in silicon | Physics | 10 | Expired |
Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.