Matrix Integrated Systems, Inc.
16Patents
0Active
16Granted
33Portfolio score
Filing activity: Mar 14, 1990 → Aug 16, 2002
Most-cited patents
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US4971653A | Temperature controlled chuck for elevated temperature etch processing | Electricity | 55 | Expired |
| US6263830A | Microwave choke for remote plasma generator | Electricity | 52 | Expired |
| US6499777B1 | End-effector with integrated cooling mechanism | Emerging Cross-Sectional Technologies | 44 | Expired |
| US5015331A | Method of plasma etching with parallel plate reactor having a grid | Electricity | 36 | Expired |
| US6228773A | Synchronous multiplexed near zero overhead architecture for vacuum processes | Electricity | 24 | Expired |
| US6461801B1 | Rapid heating and cooling of workpiece chucks | Electricity | 24 | Expired |
| US5209803A | Parallel plate reactor and method of use | Electricity | 14 | Expired |
| US6352050B2 | Remote plasma mixer | Electricity | 12 | Expired |
| US6352936B1 | Method for stripping ion implanted photoresist layer | Physics | 12 | Expired |
| US6439155B1 | Remote plasma generator with sliding short tuner | Electricity | 11 | Expired |
| US6412438B2 | Downstream sapphire elbow joint for remote plasma generator | Electricity | 7 | Expired |
| US6660975B2 | Method for producing flat wafer chucks | Emerging Cross-Sectional Technologies | 6 | Expired |
| US6273956A | Synchronous multiplexed near zero overhead architecture for vacuum processes | Electricity | 5 | Expired |
| US6736927B2 | Apparatus for increased workpiece throughput | Electricity | 3 | Expired |
| US6409932B1 | Method and apparatus for increased workpiece throughput | Electricity | 2 | Expired |
| US6605226B2 | Method for increased workpiece throughput | Electricity | 2 | Expired |
Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.