Peak Systems, Inc.
8Patents
0Active
8Granted
30Portfolio score
Filing activity: Jul 15, 1986 → May 20, 1991
Most-cited patents
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US4984902A | Apparatus and method for compensating for errors in temperature measurement of semiconductor wafers during rapid thermal processing | Physics | 69 | Expired |
| US4969748A | Apparatus and method for compensating for errors in temperature measurement of semiconductor wafers during rapid thermal processing | Physics | 46 | Expired |
| US5073698A | Method for selectively heating a film on a substrate | Emerging Cross-Sectional Technologies | 41 | Expired |
| US4820906A | Long arc lamp for semiconductor heating | Electricity | 26 | Expired |
| US4808059A | Apparatus and method for transferring workpieces | Emerging Cross-Sectional Technologies | 24 | Expired |
| US4727297A | Arc lamp power supply | Emerging Cross-Sectional Technologies | 15 | Expired |
| US5047611A | Method for selectively curing a film on a substrate | Mechanical Engineering; Lighting; Heating | 11 | Expired |
| US5221142A | Method and apparatus for temperature measurement using thermal expansion | Physics | 11 | Expired |
Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.