PRIMAXX, INC.
6Patents
1Active
6Granted
31Portfolio score
Filing activity: Nov 17, 1997 → Mar 8, 2006 · 1 expiring within 5 years
Most-cited patents
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6428847B1 | Vortex based CVD reactor | Chemistry; Metallurgy | 24 | Expired |
| US6116184A | Method and apparatus for misted liquid source deposition of thin film with reduced mist particle size | Electricity | 13 | Expired |
| US6391804B1 | Method and apparatus for uniform direct radiant heating in a rapid thermal processing reactor | Electricity | 4 | Expired |
| US6231933A | Method and apparatus for metal oxide chemical vapor deposition on a substrate surface | Chemistry; Metallurgy | 4 | Expired |
| US6261373A | Method and apparatus for metal oxide chemical vapor deposition on a substrate surface | Chemistry; Metallurgy | 4 | Expired |
| US7431853B2 | Selective etching of oxides from substrates | Performing Operations; Transporting | 0 | Active |
Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.