Semiconductor Systems, Inc.
11Patents
0Active
11Granted
33Portfolio score
Filing activity: Jun 26, 1992 → Jun 10, 1997
Most-cited patents
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5472502A | Apparatus and method for spin coating wafers and the like | Performing Operations; Transporting | 119 | Expired |
| US5651823A | Clustered photolithography system | Emerging Cross-Sectional Technologies | 85 | Expired |
| US5766824A | Method and apparatus for curing photoresist | Electricity | 62 | Expired |
| US5443348A | Cassette input/output unit for semiconductor processing system | Emerging Cross-Sectional Technologies | 26 | Expired |
| US5935768A | Method of processing a substrate in a photolithography system utilizing a thermal process module | Emerging Cross-Sectional Technologies | 26 | Expired |
| US5289222A | Drain arrangement for photoresist coating apparatus | Emerging Cross-Sectional Technologies | 23 | Expired |
| US5427820A | Thermal control line for delivering liquid to a point of use in a photolithography system | Physics | 19 | Expired |
| US5553994A | Thermal process module for substrate coat/develop system | Emerging Cross-Sectional Technologies | 19 | Expired |
| US5392989A | Nozzle assembly for dispensing liquid | Performing Operations; Transporting | 15 | Expired |
| US5885661A | Droplet jet method for coating flat substrates with resist or similar materials | Physics | 12 | Expired |
| US5798140A | Oscillatory chuck method and apparatus for coating flat substrates | Physics | 5 | Expired |
Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.