Patent assignee · JP · COMPANY

SHINCRON CO., LTD.

20Patents
14Active
20Granted
47Portfolio score

Filing activity: Aug 31, 1993 → Jul 30, 2020 · 4 expiring within 5 years

Most-cited patents

PatentTitleAreaCited byStatus
US6103320A Method for forming a thin film of a metal compound by vacuum deposition Chemistry; Metallurgy 68 Expired
US6274014A Method for forming a thin film of a metal compound by vacuum deposition Chemistry; Metallurgy 47 Expired
US6207536A Method for forming a thin film of a composite metal compound and apparatus for carrying out the method Emerging Cross-Sectional Technologies 46 Expired
US6287430A Apparatus and method forming thin film Electricity 32 Expired
US5414506A Method of measuring refractive index of thin film and refractive index measuring apparatus therefor Physics 14 Expired
US8826856B2 Optical thin-film vapor deposition apparatus and optical thin-film production method Electricity 2 Active
US6328865A Method for forming a thin film of a composite metal compound and apparatus for carrying out the method Chemistry; Metallurgy 2 Expired
US11021783B2 Reactive sputtering apparatus and film formation method for composite metal compound film or mixture film using the same Chemistry; Metallurgy 2 Active
US8625111B2 Optical film thickness meter and thin film forming apparatus provided with optical film thickness meter Physics 1 Active
US9499897B2 Thin film forming apparatus Chemistry; Metallurgy 1 Active
US9422620B2 Translucent hard thin film Emerging Cross-Sectional Technologies 1 Active
US9157146B2 Method for depositing silicon carbide film Physics 1 Active
US8922790B2 Optical film thickness measuring device and thin film forming apparatus using the optical film thickness measuring device Physics 1 Active
US9365920B2 Method for depositing film Chemistry; Metallurgy 0 Active
US10569291B2 Film formation method and film formation apparatus for thin film Chemistry; Metallurgy 0 Active
US12270100B2 Transfer apparatus and film deposition apparatus using transfer apparatus Electricity 0 Active
US9933159B2 Oil diffusion pump and vacuum film formation device Mechanical Engineering; Lighting; Heating 0 Active
US10415135B2 Thin film formation method and thin film formation apparatus Physics 0 Active
US10000844B2 Magnetic field generator, magnetron cathode and spattering apparatus Electricity 0 Active
US9315415B2 Method for depositing film and oil-repellent substrate Emerging Cross-Sectional Technologies 0 Active

Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.