Yasuyoshi Yasaka
8Patents
0Active
8Granted
26Portfolio score
Filing activity: Jun 16, 2000 → Dec 17, 2003
Most-cited patents
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6528752B1 | Plasma processing apparatus and plasma processing method | Electricity | 363 | Expired |
| US6622650B2 | Plasma processing apparatus | Electricity | 15 | Expired |
| US6796268B2 | Microwave plasma processing system | Electricity | 11 | Expired |
| US6910440B2 | Apparatus for plasma processing | Electricity | 9 | Expired |
| US6646224B2 | Plasma-assisted processing system and plasma-assisted processing method | Electricity | 9 | Expired |
| US6953908B2 | Plasma processing apparatus | Electricity | 6 | Expired |
| US6823816B2 | Plasma processing system | Electricity | 4 | Expired |
| US6527909B2 | Plasma processing apparatus | Electricity | 2 | Expired |
Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.