Ahmad Kermani
7Patents
7h-index
13Co-inventors
56Inventor score
Filing activity: Mar 26, 1987 → Jul 11, 1996
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5937142A | Multi-zone illuminator for rapid thermal processing | Electricity | 400 | Expired |
| US5324684A | Gas phase doping of semiconductor material in a cold-wall radiantly heated reactor under reduced pressure | Emerging Cross-Sectional Technologies | 80 | Expired |
| US4755654A | Semiconductor wafer heating chamber | Chemistry; Metallurgy | 71 | Expired |
| US4984902A | Apparatus and method for compensating for errors in temperature measurement of semiconductor wafers during rapid thermal processing | Physics | 69 | Expired |
| US5976261A | Multi-zone gas injection apparatus and method for microelectronics manufacturing equipment | Chemistry; Metallurgy | 69 | Expired |
| US5002630A | Method for high temperature thermal processing with reduced convective heat loss | Chemistry; Metallurgy | 59 | Expired |
| US4969748A | Apparatus and method for compensating for errors in temperature measurement of semiconductor wafers during rapid thermal processing | Physics | 46 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.