Inventor · Cupertino, CA, US

Allison Yau

8Patents
1h-index
18Co-inventors
37Inventor score

Filing activity: Apr 9, 2020 → Sep 11, 2023

Most-cited inventions

PatentTitleAreaCited byStatus
US11784229B2 Profile shaping for control gate recesses Electricity 1 Active
US11646216B2 Systems and methods of seasoning electrostatic chucks with dielectric seasoning films Electricity 1 Active
US12315724B2 Helium-free silicon formation Electricity 0 Active
US11798803B2 Dynamic multi zone flow control for a processing system Electricity 0 Active
US12159785B2 Dynamic multi zone flow control for a processing system Electricity 0 Active
US12381106B2 Systems and methods of seasoning electrostatic chucks with dielectric seasoning films Electricity 0 Active
US12211908B2 Profile shaping for control gate recesses Electricity 0 Active
US11538677B2 Systems and methods for depositing high density and high tensile stress films Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.