Allison Yau
8Patents
1h-index
18Co-inventors
37Inventor score
Filing activity: Apr 9, 2020 → Sep 11, 2023
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US11784229B2 | Profile shaping for control gate recesses | Electricity | 1 | Active |
| US11646216B2 | Systems and methods of seasoning electrostatic chucks with dielectric seasoning films | Electricity | 1 | Active |
| US12315724B2 | Helium-free silicon formation | Electricity | 0 | Active |
| US11798803B2 | Dynamic multi zone flow control for a processing system | Electricity | 0 | Active |
| US12159785B2 | Dynamic multi zone flow control for a processing system | Electricity | 0 | Active |
| US12381106B2 | Systems and methods of seasoning electrostatic chucks with dielectric seasoning films | Electricity | 0 | Active |
| US12211908B2 | Profile shaping for control gate recesses | Electricity | 0 | Active |
| US11538677B2 | Systems and methods for depositing high density and high tensile stress films | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.