Inventor · Unterhaching, DE

Andreas Tillmann

7Patents
3h-index
21Co-inventors
57Inventor score

Filing activity: Feb 13, 1995 → Dec 20, 2023

Most-cited inventions

PatentTitleAreaCited byStatus
US5628564A Method and apparatus for wavevector selective pyrometry in rapid thermal processing systems Physics 73 Expired
US7037797B1 Localized heating and cooling of substrates Electricity 8 Expired
US5580830A Modified reaction chamber and improved gas flushing method in rapid thermal processing apparatus Emerging Cross-Sectional Technologies 7 Expired
US7041610B1 Method and apparatus for the thermal treatment of substrates Electricity 2 Expired
US11660582B2 Method for producing a pellet, pellet, catalyst charge, and static mixer Performing Operations; Transporting 1 Active
US11883811B2 Catalyst material and method of manufacturing the same Performing Operations; Transporting 1 Active
US12285748B2 Catalyst material and method of manufacturing the same Performing Operations; Transporting 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.