Bart Peter Bert Segers
11Patents
2h-index
32Co-inventors
50Inventor score
Filing activity: Jun 2, 2009 → May 6, 2022
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US10990018B2 | Computational metrology | Physics | 5 | Active |
| US11067902B2 | Computational metrology | Physics | 4 | Active |
| US10571812B2 | Method of calibrating focus measurements, measurement method and metrology apparatus, lithographic system and device manufacturing method | Physics | 2 | Active |
| US10649342B2 | Method and apparatus for determining a fingerprint of a performance parameter | Electricity | 2 | Active |
| US9519224B2 | Lithographic apparatus and method | Physics | 2 | Active |
| US8446564B2 | Lithographic apparatus and device manufacturing method | Electricity | 1 | Active |
| US11347150B2 | Computational metrology | Physics | 1 | Active |
| US10895811B2 | Methods and patterning devices and apparatuses for measuring focus performance of a lithographic apparatus, device manufacturing method | Physics | 0 | Active |
| US11385554B2 | Metrology apparatus and method for determining a characteristic relating to one or more structures on a substrate | Physics | 0 | Active |
| US12189302B2 | Computational metrology | Physics | 0 | Active |
| US11194258B2 | Method and apparatus for determining a fingerprint of a performance parameter | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.