Inventor · Tessenderlo, BE

Bart Peter Bert Segers

11Patents
2h-index
32Co-inventors
50Inventor score

Filing activity: Jun 2, 2009 → May 6, 2022

Most-cited inventions

PatentTitleAreaCited byStatus
US10990018B2 Computational metrology Physics 5 Active
US11067902B2 Computational metrology Physics 4 Active
US10571812B2 Method of calibrating focus measurements, measurement method and metrology apparatus, lithographic system and device manufacturing method Physics 2 Active
US10649342B2 Method and apparatus for determining a fingerprint of a performance parameter Electricity 2 Active
US9519224B2 Lithographic apparatus and method Physics 2 Active
US8446564B2 Lithographic apparatus and device manufacturing method Electricity 1 Active
US11347150B2 Computational metrology Physics 1 Active
US10895811B2 Methods and patterning devices and apparatuses for measuring focus performance of a lithographic apparatus, device manufacturing method Physics 0 Active
US11385554B2 Metrology apparatus and method for determining a characteristic relating to one or more structures on a substrate Physics 0 Active
US12189302B2 Computational metrology Physics 0 Active
US11194258B2 Method and apparatus for determining a fingerprint of a performance parameter Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.