Inventor · Rijswijk, NL

Bei Li

6Patents
1h-index
17Co-inventors
37Inventor score

Filing activity: Oct 19, 2011 → Jun 20, 2013

Most-cited inventions

PatentTitleAreaCited byStatus
US8735302B2 High productivity combinatorial oxide terracing and PVD/ALD metal deposition combined with lithography for gate work function extraction Electricity 2 Active
US9724637B2 Method and apparatus for circulating a glycol stream, and method of producing a natural gas product stream Chemistry; Metallurgy 1 Active
US8513117B2 Process to remove Ni and Pt residues for NiPtSi applications Electricity 1 Active
US8784572B2 Method for cleaning platinum residues on a semiconductor substrate Electricity 0 Active
US8854067B2 Circular transmission line methods compatible with combinatorial processing of semiconductors Electricity 0 Active
US8664014B2 High productivity combinatorial workflow for photoresist strip applications Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.