Inventor · Arnstorf, DE

Berndt Warm

16Patents
4h-index
37Co-inventors
60Inventor score

Filing activity: Jan 30, 1995 → Nov 7, 2019

Most-cited inventions

PatentTitleAreaCited byStatus
US5600434A Apparatus for defending against an attacking missile Physics 58 Expired
US7354168B2 Facet mirror having a number of mirror facets Physics 13 Expired
US8587767B2 Illumination optics for EUV microlithography and related system and apparatus Physics 5 Active
US6724517B2 Deformable mirror Physics 4 Expired
US7858957B2 Illumination optics for projection microlithography Physics 3 Active
US8553200B2 Optical element with at least one electrically conductive region, and illumination system with the optical element Physics 2 Active
US8562133B2 Simulator for use in ophthalmological measurements Human Necessities 1 Active
US8797507B2 Illumination system of a microlithographic projection exposure apparatus having a temperature control device Physics 1 Active
US9523922B2 Illumination system of a microlithographic projection exposure apparatus having a temperature control device Physics 1 Active
US8439902B2 Apparatus and method for processing material with focused electromagnetic radiation Human Necessities 1 Active
US9393157B2 Image processing method for determining focus depth of a refractive laser Human Necessities 1 Active
US10959882B2 Refractive treatment of an eye by printing material onto a target Performing Operations; Transporting 0 Active
US11256110B2 System and method of utilizing computer-aided optics Human Necessities 0 Active
US8643825B2 Microlithography illumination systems, components and methods Physics 0 Active
US11116396B2 Imaging multiple parts of the eye Physics 0 Active
US7990520B2 Microlithography illumination systems, components and methods Physics 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.