Facet mirror having a number of mirror facets

US7354168B2 · kind B2 · utility

Assignee

• Carl Zeiss SMT GmbH · DE

Inventors

• Hubert Holderer · Oberkochen, DE
• Andreas Heisler · Steinheim, DE
• Wolfgang Singer · Aalen, DE
• Markus Weiss · Aalen, DE
• Andreas Seifert · Aalen, DE
• Frank Melzer · Utzmemmingen, DE
• Heinz Mann · Aalen, DE
• Jurgen Faltus · Aalen, DE
• Berndt Warm · Arnstorf, DE
• Stefan Dornheim · Heidenheim, DE

Key dates

• Filing date: May 18, 2004
• Grant date: Apr 8, 2008
• Expiry date: Aug 24, 2024

Classification

• Technology area (CPC G): Physics
• CPC primary: G03F7/702
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

A facet mirror (10) is provided with a number of mirror facets (11), in which the mirror facets (11) respectively have a spherical or conical facet body (17) with a reflecting surface (12). The side of the facet body (17) averted from the reflecting surface (12) is mounted in a bearing device (15).