ChangSup Mun
8Patents
3h-index
28Co-inventors
53Inventor score
Filing activity: Oct 8, 2010 → May 14, 2020
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7972955B2 | Three dimensional semiconductor memory device and method of fabricating the same | Electricity | 12 | Active |
| US8940182B2 | Compositions for etching and methods of forming a semiconductor device using the same | Electricity | 9 | Active |
| US9368647B2 | Compositions for etching | Electricity | 6 | Active |
| US8614511B2 | Three dimensional semiconductor memory device and method of fabricating the same | Electricity | 3 | Active |
| US9136120B2 | Compositions for etching and methods of forming a semiconductor device using the same | Electricity | 2 | Active |
| US10242880B2 | Method of wet etching and method of fabricating semiconductor device using the same | Electricity | 0 | Active |
| US11653493B2 | Semiconductor memory device and method of manufacturing the same | Electricity | 0 | Active |
| US10128120B2 | Method of treating a layer | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.