Changtao WANG
6Patents
1h-index
29Co-inventors
43Inventor score
Filing activity: Sep 23, 2014 → Dec 27, 2022
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US9958784B2 | Super-resolution imaging photolithography | Physics | 2 | Active |
| US12174322B2 | F-P sensor probe, absolute distance measurement device, and absolute distance measurement method | Physics | 0 | Active |
| US12100188B2 | Template mark detection method and template position correction method based on single camera | Physics | 0 | Active |
| US12078937B1 | Near-field lithography immersion system, immersion unit and interface module thereof | Physics | 0 | Active |
| US11693320B2 | Secondary imaging optical lithography method and apparatus | Physics | 0 | Active |
| US12085846B2 | Method for inverse optical proximity correction of super-resolution lithography based on level set algorithm | Physics | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.