Inventor · Orlando, FL, US

Charles Storey

7Patents
3h-index
9Co-inventors
42Inventor score

Filing activity: Feb 6, 2001 → Jan 3, 2008

Most-cited inventions

PatentTitleAreaCited byStatus
US6951510B1 Chemical mechanical polishing pad with grooves alternating between a larger groove size and a smaller groove size Performing Operations; Transporting 14 Expired
US6896583B2 Method and apparatus for conditioning a polishing pad Performing Operations; Transporting 11 Expired
US6702654B2 Conditioning wheel for conditioning a semiconductor wafer polishing pad and method of manufacture thereof Emerging Cross-Sectional Technologies 3 Expired
US7527544B2 System of using offset gage for CMP polishing pad alignment and adjustment Performing Operations; Transporting 0 Active
US7033257B2 Carrier head for chemical mechanical polishing Performing Operations; Transporting 0 Expired
US7172496B1 Method and apparatus for cleaning slurry depositions from a water carrier Performing Operations; Transporting 0 Expired
US7338569B2 Method and system of using offset gage for CMP polishing pad alignment and adjustment Performing Operations; Transporting 0 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.