Ching-Ya Wang
14Patents
4h-index
20Co-inventors
52Inventor score
Filing activity: Apr 24, 2003 → Oct 5, 2010
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7834345B2 | Tunnel field-effect transistors with superlattice channels | Electricity | 40 | Active |
| US7329956B1 | Dual damascene cleaning method | Electricity | 8 | Active |
| US7332449B2 | Method for forming dual damascenes with supercritical fluid treatments | Emerging Cross-Sectional Technologies | 5 | Expired |
| US7667247B2 | Method for passivating gate dielectric films | Electricity | 5 | Active |
| US8030210B2 | Contact barrier structure and manufacturing methods | Electricity | 4 | Active |
| US8669163B2 | Tunnel field-effect transistors with superlattice channels | Electricity | 4 | Active |
| US7314828B2 | Repairing method for low-k dielectric materials | Electricity | 4 | Expired |
| US7387973B2 | Method for improving low-K dielectrics by supercritical fluid treatments | Electricity | 4 | Expired |
| US7588995B2 | Method to create damage-free porous low-k dielectric films and structures resulting therefrom | Emerging Cross-Sectional Technologies | 3 | Active |
| US7709903B2 | Contact barrier structure and manufacturing methods | Electricity | 3 | Active |
| US6875285B2 | System and method for dampening high pressure impact on porous materials | Electricity | 2 | Expired |
| US7538398B2 | System and method for forming a semiconductor device source/drain contact | Electricity | 0 | Active |
| US7951723B2 | Integrated etch and supercritical CO2 process and chamber design | Physics | 0 | Active |
| US7354623B2 | Surface modification of a porous organic material through the use of a supercritical fluid | Emerging Cross-Sectional Technologies | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.