Chris Steely
6Patents
1h-index
16Co-inventors
37Inventor score
Filing activity: Nov 8, 2019 → Jun 1, 2023
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US11862524B2 | Overlay mark design for electron beam overlay | Electricity | 1 | Active |
| US11720031B2 | Overlay design for electron beam and scatterometry overlay measurements | Physics | 0 | Active |
| US12055859B2 | Overlay mark design for electron beam overlay | Physics | 0 | Active |
| US11703767B2 | Overlay mark design for electron beam overlay | Physics | 0 | Active |
| US11467503B2 | Field-to-field corrections using overlay targets | Physics | 0 | Active |
| US10990022B2 | Field-to-field corrections using overlay targets | Physics | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.