Daisuke Toriya
12Patents
3h-index
23Co-inventors
56Inventor score
Filing activity: Feb 7, 2003 → Mar 17, 2021
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| USD658692S1 | Liner for plasma processing apparatus | General | 11 | Expired |
| US10094019B2 | Film forming apparatus | Electricity | 4 | Active |
| US7367350B2 | Processing device and method of maintaining the device | Emerging Cross-Sectional Technologies | 3 | Expired |
| US8334481B2 | Mounting table structure, and processing apparatus | Chemistry; Metallurgy | 2 | Active |
| US11441224B2 | Method of controlling substrate processing apparatus, and substrate processing apparatus | Chemistry; Metallurgy | 1 | Active |
| US10221478B2 | Film formation device | Electricity | 1 | Active |
| US11466365B2 | Film-forming apparatus | Electricity | 0 | Active |
| US10156014B2 | Gas treatment apparatus and gas treatment method | Electricity | 0 | Active |
| US10526702B2 | Film forming apparatus | Electricity | 0 | Active |
| US11280002B2 | Placement apparatus and processing apparatus | Chemistry; Metallurgy | 0 | Active |
| US11396704B2 | Substrate holder and film forming apparatus | Chemistry; Metallurgy | 0 | Active |
| US11281116B2 | Substrate stage and substrate processing apparatus | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.