Inventor · Oberkochen, DE

Daniel Golde

5Patents
1h-index
13Co-inventors
40Inventor score

Filing activity: Feb 24, 2017 → Dec 16, 2022

Most-cited inventions

PatentTitleAreaCited byStatus
US10048592B2 Projection lens, projection exposure apparatus and projection exposure method for EUV microlithography Physics 3 Active
US12210289B2 Mirror, in particular for a microlithographic projection exposure apparatus Electricity 0 Active
US10591825B2 Projection lens, projection exposure apparatus and projection exposure method for EUV microlithography Physics 0 Active
US12222655B2 Stop, optical system and lithography apparatus Physics 0 Active
US9933710B2 Projection exposure method and projection exposure apparatus Physics 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.