David Robert Evans
11Patents
3h-index
12Co-inventors
57Inventor score
Filing activity: Feb 4, 1988 → Feb 25, 2022
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US9888554B2 | System, method and apparatus for target material debris cleaning of EUV vessel and EUV collector | Electricity | 6 | Active |
| US9301382B2 | Apparatus for and method of source material delivery in a laser produced plasma EUV light source | Electricity | 5 | Active |
| US9795023B2 | Apparatus for and method of source material delivery in a laser produced plasma EUV light source | Electricity | 3 | Active |
| US10362664B2 | System, method and apparatus for target material debris cleaning of EUV vessel and EUV collector | Electricity | 2 | Active |
| US4866728A | Electric discharge apparatus | Electricity | 1 | Expired |
| US11347154B2 | Cleaning a structure surface in an EUV chamber | Electricity | 1 | Active |
| US10681795B2 | Apparatus for and method of source material delivery in a laser produced plasma EUV light source | Physics | 1 | Active |
| US10237960B2 | Apparatus for and method of source material delivery in a laser produced plasma EUV light source | Physics | 0 | Active |
| US11013096B2 | System, method and apparatus for target material debris cleaning of EUV vessel and EUV collector | Electricity | 0 | Active |
| US10477662B2 | System, method and apparatus for target material debris cleaning of EUV vessel and EUV collector | Electricity | 0 | Active |
| US12189313B2 | Cleaning a structure surface in an EUV chamber | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.