Inventor · Heverlee, BE

Denis Shamiryan

7Patents
3h-index
11Co-inventors
46Inventor score

Filing activity: Jul 9, 2001 → Sep 5, 2008

Most-cited inventions

PatentTitleAreaCited byStatus
US6662631B2 Method and apparatus for characterization of porous films Physics 25 Expired
US6593251B2 Method to produce a porous oxygen-silicon layer Electricity 14 Expired
US7521369B2 Selective removal of rare earth based high-k materials in a semiconductor device Electricity 4 Active
US7598184B2 Plasma composition for selective high-k etch Electricity 1 Active
US7964039B2 Cleaning of plasma chamber walls using noble gas cleaning step Performing Operations; Transporting 1 Active
US7390708B2 Patterning of doped poly-silicon gates Electricity 0 Active
US7799664B2 Method for selective epitaxial growth of source/drain areas Emerging Cross-Sectional Technologies 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.