Do-Yul Yoo
5Patents
2h-index
9Co-inventors
36Inventor score
Filing activity: Jun 17, 2002 → Jul 13, 2007
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7288848B2 | Overlay mark for measuring and correcting alignment errors | Electricity | 3 | Expired |
| US7804596B2 | Overlay key, method of forming the overlay key and method of measuring overlay accuracy using the overlay key | Electricity | 3 | Active |
| US7732105B2 | Photomask with overlay mark and method of fabricating semiconductor device | Physics | 1 | Active |
| US6841338B2 | Photoresist composition and method of forming a photoresist pattern with a controlled remnant ratio | Physics | 1 | Expired |
| US7236245B2 | Overlay key with a plurality of crossings and method of measuring overlay accuracy using the same | Physics | 0 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.