Edwin Arevalo
6Patents
3h-index
22Co-inventors
53Inventor score
Filing activity: Nov 28, 2001 → Sep 9, 2020
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US8450193B2 | Techniques for temperature-controlled ion implantation | Electricity | 7 | Active |
| US7642150B2 | Techniques for forming shallow junctions | Electricity | 5 | Active |
| US7026229B2 | Athermal annealing with rapid thermal annealing system and method | Electricity | 4 | Expired |
| US7927986B2 | Ion implantation with heavy halogenide compounds | Electricity | 1 | Active |
| US10515802B2 | Techniques for forming low stress mask using implantation | Electricity | 1 | Active |
| US11551904B2 | System and technique for profile modulation using high tilt angles | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.