Eli Mor
7Patents
2h-index
9Co-inventors
36Inventor score
Filing activity: Sep 4, 2018 → May 30, 2023
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US10847393B2 | Method and apparatus for measuring process kit centering | Performing Operations; Transporting | 5 | Active |
| US10794681B2 | Long range capacitive gap measurement in a wafer form sensor system | Electricity | 4 | Active |
| US11709477B2 | Autonomous substrate processing system | Physics | 2 | Active |
| US11387122B2 | Method and apparatus for measuring process kit centering | Performing Operations; Transporting | 1 | Active |
| US12265377B2 | Autonomous substrate processing system | Physics | 1 | Active |
| US11521872B2 | Method and apparatus for measuring erosion and calibrating position for a moving process kit | Physics | 0 | Active |
| US11978647B2 | Method and apparatus for measuring erosion and calibrating position for a moving process kit | Physics | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.