Emily E. Fisch
8Patents
5h-index
21Co-inventors
55Inventor score
Filing activity: Sep 1, 1998 → Jan 20, 2004
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6276370A | Sonic cleaning with an interference signal | Emerging Cross-Sectional Technologies | 37 | Expired |
| US6282459A | Structure and method for detection of physical interference during transport of an article | Emerging Cross-Sectional Technologies | 18 | Expired |
| US6699400B1 | Etch process and apparatus therefor | Emerging Cross-Sectional Technologies | 10 | Expired |
| US6372573B1 | Self-aligned trench capacitor capping process for high density DRAM cells | Electricity | 8 | Expired |
| US6577406B2 | Structure for lithographic focus control features | Physics | 6 | Expired |
| US6777137B2 | EUVL mask structure and method of formation | Physics | 4 | Expired |
| US6683306B2 | Array foreshortening measurement using a critical dimension scanning electron microscope | Electricity | 1 | Expired |
| US7332054B2 | Etch apparatus | Emerging Cross-Sectional Technologies | 1 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.