Inventor · Newark, CA, US

Erwan Le Roy

8Patents
4h-index
9Co-inventors
42Inventor score

Filing activity: May 30, 2002 → May 29, 2007

Most-cited inventions

PatentTitleAreaCited byStatus
US7135123B1 Method and system for integrated circuit backside navigation Electricity 16 Expired
US6955930B2 Method for determining thickness of a semiconductor substrate at the floor of a trench Electricity 7 Expired
US6855622B2 Method and apparatus for forming a cavity in a semiconductor substrate using a charged particle beam Electricity 5 Expired
US7115426B2 Method and apparatus for addressing thickness variations of a trench floor formed in a semiconductor substrate Electricity 4 Expired
US7884024B2 Apparatus and method for optical interference fringe based integrated circuit processing Electricity 3 Active
US7488937B2 Method and apparatus for the improvement of material/voltage contrast Electricity 1 Active
US7036109B1 Imaging integrated circuits with focused ion beam Electricity 1 Expired
US7697146B2 Apparatus and method for optical interference fringe based integrated circuit processing Performing Operations; Transporting 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.