Euclid E. Moon
9Patents
6h-index
4Co-inventors
56Inventor score
Filing activity: Jun 1, 1993 → Jul 20, 2017
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5414514A | On-axis interferometric alignment of plates using the spatial phase of interference patterns | Electricity | 168 | Expired |
| US5808742A | Optical alignment apparatus having multiple parallel alignment marks | Physics | 114 | Expired |
| US6088103A | Optical interference alignment and gapping apparatus | Physics | 62 | Expired |
| US6522411B1 | Optical gap measuring apparatus and method having two-dimensional grating mark with chirp in one direction | Physics | 52 | Expired |
| US7474410B2 | Nanometer-precision tip-to-substrate control and pattern registration for scanning-probe lithography | Physics | 22 | Active |
| US7247843B1 | Long-range gap detection with interferometric sensitivity using spatial phase of interference patterns | Physics | 13 | Expired |
| US7535581B2 | Nanometer-level mix-and-match scanning tip and electron beam lithography using global backside position reference marks | Electricity | 2 | Active |
| US7800761B2 | Infrared interferometric-spatial-phase imaging using backside wafer marks | Physics | 1 | Active |
| US10408754B2 | Method of measuring a target, substrate, metrology apparatus, and lithographic apparatus | Physics | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.