Fernando HUNG LOW
5Patents
0h-index
9Co-inventors
30Inventor score
Filing activity: Jan 5, 2017 → Sep 14, 2021
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US10968366B2 | Composition and method for metal CMP | Electricity | 0 | Active |
| US10294399B2 | Composition and method for polishing silicon carbide | Electricity | 0 | Active |
| US11802220B2 | Silica-based slurry for selective polishing of carbon-based films | Electricity | 0 | Active |
| US12227673B2 | Composition and method for silicon nitride CMP | Chemistry; Metallurgy | 0 | Active |
| US10988635B2 | Composition and method for copper barrier CMP | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.