Inventor · Arlington, MA, US

Gary J. Rosen

6Patents
5h-index
22Co-inventors
59Inventor score

Filing activity: Dec 21, 1998 → Aug 24, 2010

Most-cited inventions

PatentTitleAreaCited byStatus
US6583428B1 Apparatus for the backside gas cooling of a wafer in a batch ion implantation system Electricity 10 Expired
US7223308B2 Apparatus to improve wafer temperature uniformity for face-up wet processing Chemistry; Metallurgy 9 Expired
US7833351B2 Batch processing platform for ALD and CVD Emerging Cross-Sectional Technologies 9 Active
US6065499A Lateral stress relief mechanism for vacuum bellows Electricity 7 Expired
US7311779B2 Heating apparatus to heat wafers using water and plate with turbolators Electricity 5 Expired
US9057146B2 Eddy current thickness measurement apparatus Emerging Cross-Sectional Technologies 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.