Gary J. Rosen
6Patents
5h-index
22Co-inventors
59Inventor score
Filing activity: Dec 21, 1998 → Aug 24, 2010
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6583428B1 | Apparatus for the backside gas cooling of a wafer in a batch ion implantation system | Electricity | 10 | Expired |
| US7223308B2 | Apparatus to improve wafer temperature uniformity for face-up wet processing | Chemistry; Metallurgy | 9 | Expired |
| US7833351B2 | Batch processing platform for ALD and CVD | Emerging Cross-Sectional Technologies | 9 | Active |
| US6065499A | Lateral stress relief mechanism for vacuum bellows | Electricity | 7 | Expired |
| US7311779B2 | Heating apparatus to heat wafers using water and plate with turbolators | Electricity | 5 | Expired |
| US9057146B2 | Eddy current thickness measurement apparatus | Emerging Cross-Sectional Technologies | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.