Patent · US Active

Electrostatic chucking force measurement tool for process chamber carriers

US10879094B2 · kind B2 · utility

1Cited by

3References

19Claims

0Family size

Assignee

Applied Materials, Inc. · US

Inventors

Srinivas D. Nemani · Sunnyvale, US
Gautam Pisharody · Newark, US
Seshadri Ramaswami · San Jose, US
Shambhu N. Roy · Roseville, US
Niranjan Kumar · Bengaluru, IN

Key dates

Filing date	Nov 23, 2016
Grant date	Dec 29, 2020
Priority date	—
Expiry date	Jul 19, 2037

Classification

Technology area (CPC H)Electricity
CPC primaryH01L21/6838
WIPO fieldSemiconductors
WIPO sectorElectrical engineering

Abstract

An electrostatic chucking force tool is described that may be used on workpiece carriers for micromechanical and semiconductor processing. One example includes a workpiece fitting to hold a workpiece when gripped by an electrostatic chucking force by an electrostatic chuck, an arm coupled to the workpiece fitting to pull the workpiece through the workpiece fitting laterally across the chuck, and a force gauge coupled to the arm to measure an amount of force with which the workpiece fitting is pulled by the arm in order to move the workpiece.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.