Gregory Herdt
12Patents
4h-index
12Co-inventors
57Inventor score
Filing activity: Jun 29, 1994 → Jan 13, 2017
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6890790B2 | Co-sputter deposition of metal-doped chalcogenides | Electricity | 13 | Expired |
| US7776743B2 | Method of forming semiconductor devices containing metal cap layers | Electricity | 6 | Active |
| US7446393B2 | Co-sputter deposition of metal-doped chalcogenides | Electricity | 5 | Active |
| US7871929B2 | Method of forming semiconductor devices containing metal cap layers | Electricity | 4 | Active |
| US5591690A | Self assembled molecular monolayers on high surface area materials as molecular getters | Performing Operations; Transporting | 4 | Expired |
| US8575752B2 | Modulated deposition process for stress control in thick TiN films | Electricity | 3 | Active |
| US8226835B2 | Ultra-thin film formation using gas cluster ion beam processing | Emerging Cross-Sectional Technologies | 3 | Active |
| US10403575B2 | Interconnect structure with nitrided barrier | Electricity | 1 | Active |
| US8328585B2 | Modulated deposition process for stress control in thick TiN films | Electricity | 1 | Active |
| US7202104B2 | Co-sputter deposition of metal-doped chalcogenides | Electricity | 1 | Expired |
| US8592307B2 | Modulated deposition process for stress control in thick TiN films | Electricity | 0 | Active |
| US7964436B2 | Co-sputter deposition of metal-doped chalcogenides | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.