Hali Forstner
4Patents
4h-index
11Co-inventors
43Inventor score
Filing activity: Jan 13, 1998 → Nov 16, 2004
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6042654A | Method of cleaning CVD cold-wall chamber and exhaust lines | Chemistry; Metallurgy | 66 | Expired |
| US6916744B2 | Method and apparatus for planarization of a material by growing a sacrificial film with customized thickness profile | Electricity | 16 | Expired |
| US6368567B2 | Point-of-use exhaust by-product reactor | Chemistry; Metallurgy | 11 | Expired |
| US7642171B2 | Multi-step anneal of thin films for film densification and improved gap-fill | Electricity | 9 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.