Inventor · Burlingame, CA, US

Hui Chen

6Patents
3h-index
19Co-inventors
50Inventor score

Filing activity: Mar 4, 1998 → Apr 7, 2015

Most-cited inventions

PatentTitleAreaCited byStatus
US6762127B2 Etch process for dielectric materials comprising oxidized organo silane materials Electricity 294 Expired
US6022800A Method of forming barrier layer for tungsten plugs in interlayer dielectrics Electricity 10 Expired
US6096645A Method of making IC devices having stable CVD titanium nitride films Electricity 4 Expired
US9797060B2 Nanostructured sapphire optical fiber sensing platform Chemistry; Metallurgy 1 Active
US9500857B2 Microelectromechanical system device having a hinge layer Performing Operations; Transporting 0 Active
US6916700B1 Mixed-mode process Electricity 0 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.