Igor Hurevich
4Patents
2h-index
13Co-inventors
37Inventor score
Filing activity: Jul 19, 2011 → Mar 21, 2017
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US8873023B2 | Illumination system for microlithography | Physics | 4 | Active |
| US9280060B2 | Illumination system for microlithography | Physics | 3 | Active |
| US9606441B2 | Illumination system for microlithography | Physics | 1 | Active |
| US10088754B2 | Illumination system for microlithography | Physics | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.