Ilan Sela
9Patents
6h-index
27Co-inventors
59Inventor score
Filing activity: Aug 6, 2004 → Nov 12, 2018
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US8441639B2 | Metrology systems and methods | Physics | 32 | Active |
| US9080971B2 | Metrology systems and methods | Physics | 15 | Active |
| US7433039B1 | Apparatus and methods for reducing tool-induced shift during overlay metrology | Physics | 12 | Expired |
| US8873054B2 | Metrology systems and methods | Physics | 12 | Active |
| US10203247B2 | Systems for providing illumination in optical metrology | Electricity | 9 | Active |
| US9958385B2 | Scanning in angle-resolved reflectometry and algorithmically eliminating diffraction from optical metrology | Physics | 8 | Active |
| US9512985B2 | Systems for providing illumination in optical metrology | Electricity | 2 | Active |
| US10533940B2 | Scanning in angle-resolved reflectometry and algorithmically eliminating diffraction from optical metrology | Physics | 1 | Active |
| US10126238B2 | Scanning in angle-resolved reflectometry and algorithmically eliminating diffraction from optical metrology | Physics | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.