Metrology systems and methods
US8441639B2 · kind B2 · utility
32Cited by
37References
22Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 31, 2010 |
| Grant date | May 14, 2013 |
| Priority date | — |
| Expiry date | Jul 17, 2031 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2201/105
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Various metrology systems and methods are provided.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.