Illumination system coherence remover with two sets of stepped mirrors
US8164740B2 · kind B2 · utility
2Cited by
29References
14Claims
0Family size
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Key dates
| Filing date | Dec 4, 2008 |
| Grant date | Apr 24, 2012 |
| Priority date | — |
| Expiry date | Apr 3, 2029 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/70075
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A coherence remover is provided. In an embodiment the coherence remover includes a first mirror and a second mirror coupled to the first mirror. The coherence remover is configured to receive an input beam. Each of the first and second mirrors is configured to reflect a respective portion of the input beam to produce respective one or more intermediate beams. The intermediate beams collectively form an output beam that has a reduced coherence compared to the input beam.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.