James B. Burris
4Patents
4h-index
4Co-inventors
36Inventor score
Filing activity: Jul 16, 1987 → Dec 13, 1988
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US4916091A | Plasma and plasma UV deposition of SiO.sub.2 | Electricity | 469 | Expired |
| US4910043A | Processing apparatus and method | Electricity | 40 | Expired |
| US4906328A | Method for wafer treating | Emerging Cross-Sectional Technologies | 30 | Expired |
| US4882299A | Deposition of polysilicon using a remote plasma and in situ generation of UV light. | Emerging Cross-Sectional Technologies | 12 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.