Inventor · Los Gatos, CA, US

Jeff Olsen

5Patents
5h-index
11Co-inventors
52Inventor score

Filing activity: Apr 10, 1995 → May 3, 2000

Most-cited inventions

PatentTitleAreaCited byStatus
US6024044A Dual frequency excitation of plasma for film deposition Chemistry; Metallurgy 88 Expired
US5928732A Method of forming silicon oxy-nitride films by plasma-enhanced chemical vapor deposition Emerging Cross-Sectional Technologies 34 Expired
US6857387B1 Multiple frequency plasma chamber with grounding capacitor at cathode Electricity 29 Expired
US6207304A Method of forming silicon oxy-nitride films by plasma-enhanced chemical vapor deposition Emerging Cross-Sectional Technologies 16 Expired
US6352910B1 Method of depositing amorphous silicon based films having controlled conductivity Chemistry; Metallurgy 5 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.