Joel Ng
7Patents
3h-index
19Co-inventors
54Inventor score
Filing activity: Aug 28, 2002 → Oct 25, 2022
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US10692705B2 | Advanced optical sensor and method for detecting an optical event in a light emission signal in a plasma chamber | Physics | 4 | Active |
| US7027158B2 | Beam splitter/combiner for optical meterology tool | Physics | 3 | Expired |
| US7154607B2 | Flat spectrum illumination source for optical metrology | Physics | 3 | Expired |
| US7251036B2 | Beam splitter/combiner for optical metrology tool | Physics | 2 | Expired |
| US12158374B2 | Time-resolved OES data collection | Electricity | 0 | Active |
| US12362158B2 | Method for OES data collection and endpoint detection | Electricity | 0 | Active |
| US12306044B2 | Optical emission spectroscopy for advanced process characterization | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.