Inventor · Redwood City, CA, US

John H. McCoy

11Patents
9h-index
11Co-inventors
69Inventor score

Filing activity: Apr 5, 1976 → Mar 16, 2000

Most-cited inventions

PatentTitleAreaCited byStatus
US6014200A High throughput electron beam lithography system Electricity 88 Expired
US4019109A Alignment system and method with micromovement stage Performing Operations; Transporting 58 Expired
US5437946A Multiple reticle stitching for scanning exposure system Physics 42 Expired
US5777729A Wafer inspection method and apparatus using diffracted light Physics 41 Expired
US5648854A Alignment system with large area search for wafer edge and global marks Physics 40 Expired
US6376329B1 Semiconductor wafer alignment using backside illumination Physics 34 Expired
US4085329A Hard X-ray and fluorescent X-ray detection of alignment marks for precision mask alignment Physics 24 Expired
US5838450A Direct reticle to wafer alignment using fluorescence for integrated circuit lithography Physics 16 Expired
US5741614A Atomic force microscope measurement process for dense photoresist patterns Emerging Cross-Sectional Technologies 16 Expired
US6316164A Proximity effect correction method through uniform removal of fraction of interior pixels Emerging Cross-Sectional Technologies 4 Expired
US5936254A Thin film detection method and apparatus Physics 2 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.