Inventor · Wenham, MA, US

John Ruffell

10Patents
6h-index
12Co-inventors
63Inventor score

Filing activity: Nov 29, 1978 → Feb 15, 2011

Most-cited inventions

PatentTitleAreaCited byStatus
US5053627A Apparatus for ion implantation Electricity 29 Expired
US6179921A Backside gas delivery system for a semiconductor wafer processing system Emerging Cross-Sectional Technologies 20 Expired
US6350097B1 Method and apparatus for processing wafers Emerging Cross-Sectional Technologies 17 Expired
US4812663A Calorimetric dose monitor for ion implantation equipment Physics 16 Expired
US6555832B1 Determining beam alignment in ion implantation using Rutherford Back Scattering Electricity 16 Expired
US6525327B1 Ion implanter and beam stop therefor Electricity 9 Expired
US6679675B2 Method and apparatus for processing wafers Emerging Cross-Sectional Technologies 2 Expired
US4307406A Multistyli recording systems Electricity 2 Expired
US8481959B2 Apparatus and method for multi-directionally scanning a beam of charged particles Electricity 1 Active
US8399851B2 Systems and methods for scanning a beam of charged particles Electricity 1 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.