Jong-Kill Lim
7Patents
1h-index
11Co-inventors
44Inventor score
Filing activity: Dec 11, 2001 → Feb 11, 2020
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7115840B2 | Wafer bake apparatus | Electricity | 2 | Expired |
| US6816230B2 | Exposure control apparatus in a lithography system and method thereof | Physics | 1 | Expired |
| US7377776B2 | Semiconductor wafer baking apparatus | Mechanical Engineering; Lighting; Heating | 1 | Active |
| US11779871B2 | Exhaust module for wafer baking apparatus and wafer processing system having the same | Physics | 0 | Active |
| US11581187B2 | Method of heating SOC film on wafer by electromagnetic wave generator and heating apparatus using the same | Electricity | 0 | Active |
| US10854484B1 | Method and system for managing liquid supply | Physics | 0 | Active |
| US11545359B2 | Method of heating SOC film on wafer by electromagnetic wave generator and heating apparatus using the same | General | 0 | Revoked |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.