Jun Sonobe
7Patents
2h-index
15Co-inventors
44Inventor score
Filing activity: Sep 26, 2005 → Mar 2, 2020
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US9012331B2 | Etching method and non-transitory storage medium | Electricity | 2 | Active |
| US9540727B2 | Cleaning method, method of manufacturing semiconductor device, substrate processing apparatus and recording medium | Electricity | 2 | Active |
| US8679259B2 | Substrate processing apparatus, method of manufacturing semiconductor device and method of cleaning processing vessel | Electricity | 2 | Active |
| US8119853B2 | Low pressure acetylene storage | Performing Operations; Transporting | 2 | Active |
| US9683288B2 | Method of manufacturing semiconductor device and method of cleaning processing vessel | Electricity | 1 | Active |
| US7942974B2 | Method of cleaning a film-forming apparatus | Chemistry; Metallurgy | 0 | Active |
| US11920732B2 | Use of stable isotopes of CO2 to validate cylinder preparation | Physics | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.