Inventor · Ibaraki, JP

Jun Sonobe

7Patents
2h-index
15Co-inventors
44Inventor score

Filing activity: Sep 26, 2005 → Mar 2, 2020

Most-cited inventions

PatentTitleAreaCited byStatus
US9012331B2 Etching method and non-transitory storage medium Electricity 2 Active
US9540727B2 Cleaning method, method of manufacturing semiconductor device, substrate processing apparatus and recording medium Electricity 2 Active
US8679259B2 Substrate processing apparatus, method of manufacturing semiconductor device and method of cleaning processing vessel Electricity 2 Active
US8119853B2 Low pressure acetylene storage Performing Operations; Transporting 2 Active
US9683288B2 Method of manufacturing semiconductor device and method of cleaning processing vessel Electricity 1 Active
US7942974B2 Method of cleaning a film-forming apparatus Chemistry; Metallurgy 0 Active
US11920732B2 Use of stable isotopes of CO2 to validate cylinder preparation Physics 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.