Jun Zhao
283Patents
37h-index
274Co-inventors
93Inventor score
Filing activity: May 11, 1990 → Dec 5, 2024
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5558717A | CVD Processing chamber | Emerging Cross-Sectional Technologies | 971 | Expired |
| US6035101A | High temperature multi-layered alloy heater assembly and related methods | Electricity | 835 | Expired |
| US5846332A | Thermally floating pedestal collar in a chemical vapor deposition chamber | Electricity | 782 | Expired |
| US6129044A | Apparatus for substrate processing with improved throughput and yield | Electricity | 546 | Expired |
| US6210485A | Chemical vapor deposition vaporizer | Chemistry; Metallurgy | 382 | Expired |
| US6189482A | High temperature, high flow rate chemical vapor deposition apparatus and related methods | Electricity | 340 | Expired |
| US6099651A | Temperature controlled chamber liner | Emerging Cross-Sectional Technologies | 317 | Expired |
| US5993916A | Method for substrate processing with improved throughput and yield | Electricity | 269 | Expired |
| US6179924A | Heater for use in substrate processing apparatus to deposit tungsten | Electricity | 262 | Expired |
| US5951776A | Self aligning lift mechanism | Electricity | 244 | Expired |
| US6258170A | Vaporization and deposition apparatus | Emerging Cross-Sectional Technologies | 224 | Expired |
| US5968379A | High temperature ceramic heater assembly with RF capability and related methods | Electricity | 179 | Expired |
| USD622631S1 | All terrain vehicle | General | 120 | Expired |
| US5882411A | Faceplate thermal choke in a CVD plasma reactor | Electricity | 113 | Expired |
| US6051286A | High temperature, high deposition rate process and apparatus for depositing titanium layers | Electricity | 109 | Expired |
| US5643364A | Plasma chamber with fixed RF matching | Electricity | 103 | Expired |
| US6773507B2 | Apparatus and method for fast-cycle atomic layer deposition | Emerging Cross-Sectional Technologies | 99 | Expired |
| US5983906A | Methods and apparatus for a cleaning process in a high temperature, corrosive, plasma environment | Emerging Cross-Sectional Technologies | 90 | Expired |
| US5885356A | Method of reducing residue accumulation in CVD chamber using ceramic lining | Emerging Cross-Sectional Technologies | 88 | Expired |
| US6056823A | Temperature controlled gas feedthrough | Emerging Cross-Sectional Technologies | 87 | Expired |
| USD595613S1 | All terrain vehicle | General | 79 | Expired |
| US6192319A | Statistical impact analysis computer system | Physics | 75 | Expired |
| US6616767B2 | High temperature ceramic heater assembly with RF capability | Electricity | 74 | Expired |
| US5853607A | CVD processing chamber | Emerging Cross-Sectional Technologies | 61 | Expired |
| US6440495B1 | Chemical vapor deposition of ruthenium films for metal electrode applications | Chemistry; Metallurgy | 61 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.