Katja Steffen
4Patents
2h-index
13Co-inventors
37Inventor score
Filing activity: Apr 29, 2003 → Dec 16, 2010
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US8138038B2 | Superior fill conditions in a replacement gate approach by performing a polishing process based on a sacrificial fill material | Electricity | 5 | Active |
| US8338306B2 | Forming semiconductor resistors in a semiconductor device comprising metal gates by increasing etch resistivity of the resistors | Electricity | 2 | Active |
| US6867442B2 | Surface-functionalized inorganic semiconductor particles as electrical semiconductors for microelectronics applications | Electricity | 1 | Expired |
| US8585465B2 | Planarization of a material system in a semiconductor device by using a non-selective in situ prepared slurry | Electricity | 1 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.