Kazuaki Tonari
8Patents
3h-index
14Co-inventors
50Inventor score
Filing activity: Sep 21, 2001 → May 9, 2014
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6473563B2 | Vaporizer and apparatus for vaporizing and supplying | Chemistry; Metallurgy | 8 | Expired |
| US7036801B2 | Vaporizer and apparatus for vaporizing and supplying | Emerging Cross-Sectional Technologies | 7 | Expired |
| US6638489B2 | Cleaning process and cleaning agent for harmful gas | Performing Operations; Transporting | 5 | Expired |
| US8178428B2 | Manufacturing method of semiconductor device and substrate processing apparatus | Electricity | 3 | Active |
| US9496267B2 | Method for manufacturing semiconductor device | Electricity | 2 | Active |
| US9786762B2 | Gate electrode of a semiconductor device, and method for producing same | Electricity | 1 | Active |
| US8710624B2 | Semiconductor device | Electricity | 1 | Active |
| US7195795B2 | Material for forming insulation film and film-forming method with the use of the material | Chemistry; Metallurgy | 0 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.