Inventor · Yokohama, JP

Kazuaki Tonari

8Patents
3h-index
14Co-inventors
50Inventor score

Filing activity: Sep 21, 2001 → May 9, 2014

Most-cited inventions

PatentTitleAreaCited byStatus
US6473563B2 Vaporizer and apparatus for vaporizing and supplying Chemistry; Metallurgy 8 Expired
US7036801B2 Vaporizer and apparatus for vaporizing and supplying Emerging Cross-Sectional Technologies 7 Expired
US6638489B2 Cleaning process and cleaning agent for harmful gas Performing Operations; Transporting 5 Expired
US8178428B2 Manufacturing method of semiconductor device and substrate processing apparatus Electricity 3 Active
US9496267B2 Method for manufacturing semiconductor device Electricity 2 Active
US9786762B2 Gate electrode of a semiconductor device, and method for producing same Electricity 1 Active
US8710624B2 Semiconductor device Electricity 1 Active
US7195795B2 Material for forming insulation film and film-forming method with the use of the material Chemistry; Metallurgy 0 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.