Kei TAKECHI
4Patents
1h-index
9Co-inventors
30Inventor score
Filing activity: Feb 7, 2018 → Jun 27, 2021
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US11164750B2 | Substrate processing device and substrate processing method | Electricity | 1 | Active |
| US10559480B2 | Substrate treatment apparatus and substrate treatment method | Chemistry; Metallurgy | 1 | Active |
| US12308258B2 | Substrate processing apparatus and substrate processing method | Electricity | 0 | Active |
| US11699601B2 | Substrate processing method | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.